Optoelectronics Group possesses the infrastructure for wafer processing, testing and sophisticated characterization of optoelectronics devices. Move mouse over the thumbnails below to get a larger view and complete information on each facility.


Veeco GEN 930 MBE system

Veeco diDimension V AFM

PANalytical X-ray diffraction system

Class 100 clean room

Karl Suss MJB3 mask aligner

OAI dual side mask aligner

Trion PECVD

Temescal BJD-1800 E-beam deposition system

Trion ICP-RIE

WEST BOND wire bonder

CAMMAX Die bonder

Loomis Die scriber

Denton Exploer E-beam thin film deposion system

Device characterization bench

Device characterization bench

Frequency-modulated photoluminescence response measurement setup

Ultrafast lab