Optoelectronics Group possesses the infrastructure for wafer processing, testing and sophisticated characterization of optoelectronics devices. Move mouse over the thumbnails below to get a larger view and complete information on each facility.
Veeco GEN 930 MBE system
Veeco diDimension V AFM
PANalytical X-ray diffraction system
Class 100 clean room
Karl Suss MJB3 mask aligner
OAI dual side mask aligner
Trion PECVD
Temescal BJD-1800 E-beam deposition system
Trion ICP-RIE
WEST BOND wire bonder
CAMMAX Die bonder
Loomis Die scriber
Denton Exploer E-beam thin film deposion system
Device characterization bench
Device characterization bench
Frequency-modulated photoluminescence response measurement setup
Ultrafast lab